Application Cases

The UV-CMP polishing machine operates in two modes: one with ultrasonic vibration signals connected and one with ultrasonic vibration signals turned off. The operational steps of the UV-CMP polishing equipment are as follows:

First, the ultrasonic signal generator produces an electrical signal of a specific frequency and waveform.
Second, the ultrasonic electrical signal is transmitted to a power amplifier to achieve the voltage and power required for the ultrasonic transducer to operate.
Third, the amplified electrical signal is sent to the ultrasonic transducer, converting the ultrasonic electrical signal into mechanical vibrations of the same frequency.

Through these three steps, the CMP polishing machine is upgraded to a UV-CMP system, and traditional chemical mechanical polishing is enhanced to ultrasonic vibration-assisted chemical mechanical polishing. By turning off the switch on the ultrasonic signal generator, the UV-CMP polishing machine reverts to the traditional chemical mechanical polishing mode.

The driving signal output by the signal generator is insufficient to operate the ultrasonic transducer properly. Therefore, a power amplifier must be configured to amplify the electrical driving signal. The amplified electrical signal enables the ultrasonic transducer to function correctly. The selected power amplifier is the Aigtek ATA-68020, with a voltage of 850 Vp-p and a maximum output current of 2.12 Ap.

Experimental Name: Ultrasonic Chemical Mechanical Polishing Equipment

Experimental Principle:
The ultrasonic signal generator produces an electrical signal of a specific frequency and waveform, but this signal is insufficient to operate the ultrasonic transducer. A power amplifier is required to amplify the driving signal from the ultrasonic signal generator. The amplified electrical signal is then transmitted to the ultrasonic transducer, providing the voltage and power necessary for its operation and ensuring proper functionality. For example, the Aigtek ATA-68020 power amplifier used in the experiment has a maximum output voltage of 850 Vp-p and a maximum output current of 2.12 Ap, meeting the operational requirements of the ultrasonic transducer.

Experimental Block Diagram:

Experimental Process:
The ultrasonic transducer, which converts electrical signals into mechanical vibrations, receives the amplified electrical signal through piezoelectric ceramic plates, producing mechanical vibrations at the same frequency as the electrical signal. A horn-shaped cover plate can amplify the mechanical signal to some extent. Since the cover plate directly contacts the sample holder, the amplified mechanical signal transmits vibrations to the sample holder. From generating the ultrasonic signal with the signal generator, amplifying it with the power amplifier, converting it into mechanical vibrations with the transducer, to transmitting the vibrations to the sample holder—this entire process transforms a CMP polishing machine into a UV-CMP device.

Application Fields:
Chip packaging polishing, aerospace component polishing, medical device processing, mirror polishing, etc.

Application Scenarios:
Ultrasonic guided waves, impact damage testing, magnetostrictive transducers, piezoelectric polarization, damage localization, pipe thickness measurement, ultrasonic cleaning, etc.

Product Recommendation:ATA-2000 Series High-Voltage Amplifier

Figure: ATA-2000 Series High-Voltage Amplifier Specifications and Parameters

This document is compiled and published by Aigtek Antai Electronics. For more case studies and product details, please stay tuned. Xi'an Aigtek Antai Electronics has become a large-scale instrument and equipment supplier with a wide range of products in the industry. All demo units are available for free trial.