Application Cases

Experiment Name: Fabrication and Closed-Loop Experiment of Piezoelectric Film Deformable Mirrors

Test Equipment: High-voltage amplifier, Wavefront sensor, Piezoelectric film deformable mirror, etc.

Experimental Process:

Figure 1: (a) Schematic diagram of the fabricated deformable mirror (b) Physical image of the deformable mirror

A piezoelectric film deformable mirror with dimensions of 100 × 100 mm was fabricated based on optimized design, as shown in Figure 1. The substrate layer thickness is 5 mm, the piezoelectric layer thickness is 0.4 mm, with an 8 × 8 electrode distribution, and individual electrode dimensions of 9 × 9 mm.

Since processes such as substrate-ceramic bonding and electrode segmentation can introduce high-frequency, high-gradient surface shape changes, the bonding and electrode segmentation processes needed to be performed prior to cold processing. Additionally, to ensure surface stability, a stress-relief process step was added before cold processing. The fabricated PFDM sample is shown in Figure 1(b).

Figure 2: (a) Physical photograph of the 100 × 100 mm unit PFDM sample (b) Response functions of the 64 drive units measured under a 100 V driving voltage

An experimental platform, as shown in Figure 2(a), was set up. A 100 V voltage was applied sequentially to each of the 64 drive units to obtain their response functions, shown in Figure 2(b). The response functions demonstrate good consistency. Integrated with corresponding high-voltage amplifiers, a wavefront sensor, and closed-loop control software, online wavefront closed-loop correction experiments were conducted. The wavefront distortion before closed-loop correction had a P-V value of 2.64λ and an RMS of 0.56λ. After closed-loop correction, the wavefront distortion was reduced to a P-V value of 0.36λ and an RMS of 0.1λ, indicating effective closed-loop performance, as shown in Figures 3(a) and 3(b).

Figure 3: (a) Wavefront distortion before closed-loop correction: P-V value 2.64λ, RMS 0.56λ. (b) Wavefront distortion after closed-loop correction: P-V value 0.36λ, RMS 0.1λ

Experimental Results:

Experimental research was conducted on the piezoelectric film deformable mirror sample, demonstrating good closed-loop performance. Eigenmode analysis of the response functions suggests that there is still room for improvement in areas such as material selection, processing technology, and mounting methods for the deformable mirror.

High-Voltage Amplifier Recommendation: ATA-7030

Figure: ATA-7030 High-Voltage Amplifier Specifications

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