Application Cases

Research Direction: The study involves compensatory control and experimental testing of the developed two-dimensional piezoelectric platform. First, open-loop experiments such as voltage-displacement characteristic tests and resolution tests are conducted to evaluate the open-loop output characteristics of the platform and verify whether it meets design goals such as rapid response, positive and negative displacement output, and high resolution. Subsequently, based on the proposed composite hysteresis dynamic model, a feedforward controller is designed and experimentally validated for its hysteresis compensation capability. Combined with PID control, a closed-loop control system is designed. Closed-loop experiments, including step response capability, positioning accuracy, and trajectory tracking performance, are performed to verify whether the two-dimensional piezoelectric platform system achieves the design goal of high positioning accuracy. Finally, the application potential of the platform is demonstrated through micro-nano engraving as an example.

Experimental Objective: To validate the rationality of the theoretical model and finite element simulation analysis and to obtain the basic output performance of the designed prototype.

Test Equipment: ATA-4052 high-voltage power amplifier, signal processor, capacitive displacement sensor, host and slave computers, and A/D and D/A boards.

Experimental Procedure:

Figure 1: Prototype Experimental System

An experimental system was established as shown in Figure 1. This system includes host and slave computers with A/D and D/A boards, the ATA-4052 high-voltage power amplifier, the prototype, capacitive displacement sensors, and their control boxes. The capacitive displacement sensors used have measurement ranges of -25 μm to 25 μm and -100 μm to 100 μm, with static linear displacement resolutions of <0.001% and dynamic linear displacement resolutions of <0.002%. In the system, software on the host computer generates excitation signals to drive the piezoelectric actuators. These signals are converted via the PCI-1721 D/A board, amplified by the ATA-4052 high-voltage power amplifier, and then applied to the piezoelectric ceramics. The displacement generated by the piezoelectric platform is measured by capacitive displacement sensors, processed by the signal processor, and then acquired by the PCI-1716 board for A/D conversion. The converted data is stored via software on the host computer.

Experimental Results:

Performance experiments were conducted on the two-dimensional piezoelectric platform, including displacement output characteristics, displacement resolution, load capacity, and resonant frequency tests. The results verified the platform's capability for positive and negative displacement output, high resolution, certain load-bearing capacity, and high resonant frequency.

Recommended Power Amplifier: ATA-4052C

Figure: ATA-4052C High-Voltage Power Amplifier Specifications

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