Application Cases

Experiment Name: Experiment on High-Precision Piezoelectric Displacement Platforms Based on Vibration Filters

Research Direction: Application of Vibration Filters in the Field of Piezoelectric Motors

Experiment Objective: This study aims to deeply explore the impact mechanism of mass and stiffness distribution on the motion characteristics of piezoelectric motors. For the first time in the field of piezoelectric motors, the concept of vibration mass isolation is proposed. By introducing a vibration filter to controllably adjust the mass and stiffness distribution of piezoelectric motors, the motion characteristics of standing-wave, traveling-wave, and inertial impact piezoelectric motors, as well as piezoelectric displacement platforms, are improved. This addresses issues such as improving operational efficiency, solving resonance point drift, and enhancing heavy-load capacity. The working mechanism of the vibration mass isolation method based on vibration filters is also explained from theoretical and experimental perspectives.

Testing Equipment: ATA-2168 high-voltage amplifier, signal generator, oscilloscope, laser displacement sensor, self-made eddy current displacement sensor, etc.

Figure 1: Experimental Test Platform

Experiment Process:

Figure 2: Flexible Hinge Structure Design

In the experiment on high-precision piezoelectric displacement platforms based on vibration filters, a control experiment is first designed. The original slider is divided into an active slider and a passive slider, which are connected by a flexible hinge to form a mobile stage based on the vibration filter. Another group serves as a reference mobile stage. Both are placed on a V-shaped groove rail, and a copper-graphite linear bearing ensures the motion of the piezoelectric actuator along the length direction. An adjustable base is used to optimize the preload by adjusting the deformation of the preloaded spring. During the experiment, the signal generator produces step, square wave, and other driving signals, which are amplified by the power amplifier and then applied to the piezoelectric actuator. The driving voltage is monitored by an oscilloscope, and the displacement of the mobile stage is measured using a laser displacement sensor. For later nanoscale positioning tests, a self-made eddy current displacement sensor is used. By changing the waveform of the driving signal (such as square wave, sawtooth wave, spike pulse wave) and the magnitude of the friction force, data on the mobile stage's step response and continuous motion characteristics are recorded. The fourth-order Runge-Kutta method is used to solve the dynamic model, and the impact of the vibration filter on platform speed, heavy-load capacity, and positioning accuracy is analyzed.

Experiment Results:

Figure 3: Step Response of the Mobile Stage

Figure 4: Relationship Between the Step Response of the Mobile Stage and the Driving Voltage

Figure 5: Continuous Motion Characteristics of the Mobile Stage

The results of the experiment on high-precision piezoelectric displacement platforms based on vibration filters show that the platform inherits the advantages of the reference platform, such as low-cost driving power supply, compact structure, and nanoscale positioning ability (at the 10 nm level), while significantly improving speed and heavy-load capacity. The final displacement in the step response reaches 6.5 μm, about four times that of the reference platform, and the movement efficiency is significantly improved when dragging a large mass load. In continuous motion tests, the speed is faster under square wave drive, and the displacement overshoot can be reduced by adjusting the driving signal waveform (such as spike pulse wave). Dynamic model calculations verify that the platform's positive displacement increases under 1.5 times the friction force. Although the flexible hinge design reduces the overall stiffness, it can be optimized to balance stiffness and isolation effects, achieving the goal of effectively improving platform motion performance without affecting nanoscale positioning accuracy.

Efficiency of the Amplifier in the Experiment: In the experiment on high-precision piezoelectric displacement platforms based on vibration filters, the power amplifier plays a key role. It amplifies the driving signal generated by the signal generator, converting the low-power electrical signal into a high-power signal sufficient to drive the piezoelectric actuator, ensuring that the piezoelectric stack generates enough mechanical displacement to move the platform. By stably amplifying driving signals such as step and square waves, the amplifier ensures the accurate response of the piezoelectric actuator to the driving signal, thereby enabling the platform to achieve improvements in speed and heavy-load capacity in the experiment. This provides reliable power support for verifying the improvement of platform motion characteristics by the vibration filter.

Antai ATA-2168 High-Voltage Amplifier:

Figure: Specifications of the ATA-2168 High-Voltage Amplifier