Application Cases

【Overview】
In this study, the Aigtek ATA-4315 high-voltage power amplifier was used to build a wafer-level physical cleaning platform, providing a high-precision online monitoring solution for wafer cleaning.

Experiment Name: Experimental Study and Analysis of High-Speed Microdroplet Three-Dimensional Online Measurement Method and Energy Transfer Efficiency of an Optical Catadioptric Coupling Device in Wafer Physical Cleaning

Experiment Objective:
This study aims to investigate the influence of parameters such as nozzle aperture and pressure on the three-dimensional measurement accuracy of microdroplets and jet stability. Using a single-camera optical reflection system combined with the OTF-BOCD algorithm, the synchronization, real-time performance, and reconstruction accuracy of the method are verified, providing a high-precision online monitoring solution for wafer cleaning.

Testing Equipment:

• Wafer-level physical cleaning platform (including jet atomizing nozzle, motion control unit, wafer adsorption platform)

• Three-dimensional vision online inspection system (integrating industrial CCD camera, LED strobe light source, magnifying lens, and precision mobile platform)

• Signal generator, power amplifier (Aigtek ATA-4315), and computer

Experimental Procedure:
The experiment focused on high-speed microdroplets in wafer cleaning. Using an optical catadioptric platform combined with the OTF-BOCD algorithm, three-dimensional online inspection and anomaly recognition were achieved. First, system calibration was completed to verify the synchronization advantages of the single-camera mode. Subsequently, three-dimensional dynamic measurements were performed, acquiring droplet motion parameters with a single-frame processing speed of 1.9 ms and successfully recognizing abnormal morphologies such as oblique jets and satellite droplets. The system stability was verified under different nozzle apertures and pressures. Finally, through real-time analysis and accuracy evaluation, the method was confirmed to meet the efficiency requirements of microdroplet online inspection in wafer cleaning processes.

Figure 1: Experimental System Flowchart

Three-Dimensional Vision Online Inspection System
(a) Stereo vision inspection platform; (b) Schematic diagram of high-frequency drive timing control

Figure 2: Three-Dimensional Vision Online Inspection System

Experimental Results:
The single-camera solution based on optical catadioptrics enabled real-time measurement of three-dimensional trajectories of high-speed microdroplets, with a single-frame processing time of 1.9 ms and an image reconstruction accuracy of 0.95. The system accurately captured jet velocities ranging from 8.1 to 25.5 m/s, with a horizontal displacement error of ≤6.1%. The OTF-BOCD algorithm significantly improved the sensitivity of abnormal morphology recognition. The system operated stably within nozzle aperture ranges of 30–50 μm and pressure ranges of 150–260 kPa, with three-dimensional coordinate errors of <±5 μm. This method fully meets the requirements of wafer-level physical cleaning processes in terms of real-time performance, accuracy, and stability.

Figure 3: Microdroplet Velocity Measurement

Figure 4: Real-Time Measurement of High-Speed Microdroplet Velocity

Figure 5: Bayesian Change Point Detection of Abnormal Jet Morphology

Advantages of Aigtek Amplifiers in This Application:

1. High voltage output capability – Generates high-speed microdroplets, supporting a wide velocity range for cleaning processes.

2. Wide bandwidth and high slew rate – Accurately reproduces high-frequency drive waveforms, ensuring droplet generation frequency and synchronization trigger precision.

3. Low distortion and high output stability – Ensures repeatability of multi-condition tests during long-duration continuous operation.

Recommended Product: ATA-4315 High-Voltage Power Amplifier

Figure: ATA-4315 High-Voltage Power Amplifier Specifications and Parameters