Application Cases

Experiment Name: Performance Test of a 3D Ultrasonic Vibration Stage

Research Direction: Micro/Nano Machining

Experimental Content:
Based on traditional probe-based nanoscratching, applying one-dimensional (1D) or two-dimensional (2D) ultrasonic vibration can effectively improve machining efficiency while reducing probe wear and material accumulation. This experiment aims to test the performance of a designed three-dimensional (3D) ultrasonic vibration stage to verify whether it meets the requirements for machining applications.

Test Objective: Characterize the operational performance of the vibration stage

Testing Equipment: Self-developed 3D ultrasonic vibration stage, Doppler laser vibrometer, DAQ acquisition card, power amplifier, piezoelectric ceramics

Experimental Procedure:
The 3D ultrasonic vibration stage features three degrees of freedom in the x, y, and z directions. Each direction is driven by an independent piezoelectric ceramic patch, enabling 1D or 2D vibration assistance during vibration-assisted machining processes. During the experiment, a control signal is first generated by a signal generator and then amplified by an ATA-2082 high-voltage amplifier to boost the voltage and power of the control signal. The amplified signal drives the piezoelectric ceramic patches to output displacement signals, which are captured by a Doppler laser vibrometer. The tests included:

• 1D vibration experiments in each of the three directions under different frequencies and voltages.

• 2D vibration experiments in the XY plane under different phase differences.

  
  

Experimental Results:
As shown in the figures, the output displacement exhibited a linear increase with increasing driving voltage. At different driving frequencies, the displacement signal initially remained constant but began to increase as the driving frequency approached the natural frequency of the vibration stage. The 2D vibration patterns varied with changes in phase difference, displaying distinct shapes. Throughout the process, the piezoelectric drive remained stable, and the displacement signals were consistent with expectations. Both channels were capable of simultaneous output, and the maximum output voltage remained stable even at ultrasonic frequencies.

ATA-2082 Power Amplifier Specifications: